Swerts, JohanJohanSwertsFedorenko, YaninaYaninaFedorenkoMaes, JanJanMaesTois, E.E.ToisDelabie, AnneliesAnneliesDelabieRagnarsson, Lars-AkeLars-AkeRagnarssonYu, HongYuHongYuYuNyns, LauraLauraNynsAdelmann, ChristophChristophAdelmannVan Elshocht, SvenSvenVan Elshocht2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12961ALD La-based oxides for Vt-tuning in high-k/metal gate stacksProceedings paper