Reiche, M.M.ReicheHimcinschi, C.C.HimcinschiGoesele, U.U.GoeseleChristiansen, S.S.ChristiansenMantl, S.S.MantlBuca, D.D.BucaZhao, Q. T.Q. T.ZhaoFeste, S.S.FesteLoo, RogerRogerLooNguyen, DuyDuyNguyenBuchholtz, W.W.BuchholtzWei, A.A.WeiHorstmann, D.D.HorstmannFeijoo, D.D.FeijooStorck, P.P.Storck2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12773Strained silicon-on-insulator : fabrication and characterizationProceedings paperhttp://www.ecsdl.org/getabs/servlet/GetabsServlet?prog=normal&id=ECSTF8000006000004000339000001&idtype=cvips&gifs=Yes