Eslava Fernandez, SalvadorSalvadorEslava FernandezIacopi, FrancescaFrancescaIacopiBaklanov, MikhaïlMikhaïlBaklanovKirschhock, Christine E. A.Christine E. A.KirschhockMaex, KarenKarenMaexMartens, Johan A.Johan A.Martens2021-10-162021-10-162007-08https://imec-publications.be/handle/20.500.12860/12137Ultra-violet-assisted cure of spin-on silicalite-1 filmsProceedings paper