Mertens, SofieSofieMertensHoffmann, Thomas Y.Thomas Y.HoffmannVrancken, ChristaChristaVranckenJakschik, StefanStefanJakschikRichard, OlivierOlivierRichardVerleysen, EvelineEvelineVerleysenBender, HugoHugoBenderZhao, ChaoChaoZhaoVandervorst, WilfriedWilfriedVandervorstAbsil, PhilippePhilippeAbsilLauwers, AnneAnneLauwers2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14166Ni(Pt)Si thermal stability improvement by carbon implantationProceedings paper