Imaging challenges in 20nm and 14nm logic nodes: hot spots performance in Metal1 layer

Timoshkov, VadimVadimTimoshkovRio, DavidDavidRioLiu, H.H.LiuGillijns, WernerWernerGillijnsWang, JingJingWangWong, PatrickPatrickWongVan Den Heuvel, DieterDieterVan Den HeuvelWiaux, VincentVincentWiauxNikolsky, PeterPeterNikolskyFinders, JoJoFinders2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23169Imaging challenges in 20nm and 14nm logic nodes: hot spots performance in Metal1 layerProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1746550