Moussa, AlainAlainMoussaSaib, MohamedMohamedSaibPaolillo, SaraSaraPaolilloLazzarino, FredericFredericLazzarinoIlliberi, AndreaAndreaIlliberiMaes, JanJanMaesDeng, ShaorenShaorenDengCharley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLeray2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33630Localized power spectral density analysis on atomic force microscopy images for advanced patterning applicationsProceedings paperhttps://doi.org/10.1117/12.2515178