Integration of wet cleaning in 45 nm pitch BEOL processing

Kesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeLazzarino, FredericFredericLazzarinoDecoster, StefanStefanDecosterWilson, ChrisChrisWilsonHolsteyns, FrankFrankHolsteynsDe Gendt, StefanStefanDe Gendt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22578Integration of wet cleaning in 45 nm pitch BEOL processingMeeting abstract