Heyns, MarcMarcHeynsNigam, TanyaTanyaNigamDegraeve, RobinRobinDegraeveMertens, PaulPaulMertensSchaekers, MarcMarcSchaekersBearda, TwanTwanBeardaDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaesClaes, MartineMartineClaesHoussa, MichelMichelHoussaVandewalle, N.N.VandewalleAusloos, M.M.Ausloos2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3511Technology and reliability aspects of ultra-thin silicon dioxide layersOral presentation