Towards an understanding of ion beam mixing by quantitative internal profiling

Tian, ChunshengChunshengTianGomez, Jose IgnacioJose IgnacioGomezBeyer, GeraldGeraldBeyerDe Bisschop, PeterPeterDe BisschopVandervorst, WilfriedWilfriedVandervorstWu, Ting-DiTing-DiWuD'Olieslaeger, MarcMarcD'Olieslaeger2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2996Towards an understanding of ion beam mixing by quantitative internal profilingProceedings paper