CNT-CNT contacts: an alternative towards low resistive horizontal interconnects

Santini, ClaudiaClaudiaSantiniVan Haesendonck, ChrisChrisVan HaesendonckDe Gendt, StefanStefanDe GendtGroeseneken,GroesenekenVereecken, PhilippePhilippeVereecken2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17941CNT-CNT contacts: an alternative towards low resistive horizontal interconnectsMeeting abstract