Bardin, FabriceFabriceBardinKloss, StephanStephanKlossWang, ChanghaiChanghaiWangMoore, Andrew J.Andrew J.MooreJourdain, AnneAnneJourdainDe Wolf, IngridIngridDe WolfHand, Duncan P.Duncan P.Hand2021-10-162021-10-162007-06https://imec-publications.be/handle/20.500.12860/11696Laser bonding of glass to silicon using polymer for microsystems packagingJournal article