Zekry, JosephJosephZekryVandevelde, BartBartVandeveldeBouwstra, SiebeSiebeBouwstraPuers, BobBobPuersVan Hoof, ChrisChrisVan HoofTilmans, HarrieHarrieTilmans2021-10-192021-10-192010-04https://imec-publications.be/handle/20.500.12860/18406Thermomechanical design and modeling of porous alumina-based thin film packages for MEMSProceedings paper