Non-planar MOVPE growth on submicron gratings for the formation of low-dimensional structures

Vermeire, GerritGerritVermeireVermaerke, FrankFrankVermaerkeVan Daele, PeterPeterVan DaeleDemeester, PietPietDemeester2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/450Non-planar MOVPE growth on submicron gratings for the formation of low-dimensional structuresMeeting abstract