Impact of mechanical stress on 3-D NAND current conduction

Kruv, AnastasiiaAnastasiiaKruvArreghini, AntonioAntonioArreghiniVerreck, DevinDevinVerreckGonzalez, MarioMarioGonzalezVan den Bosch, GeertGeertVan den BoschDe Wolf, IngridIngridDe WolfRosmeulen, MaartenMaartenRosmeulen2021-10-282021-10-2820200018-9383https://imec-publications.be/handle/20.500.12860/35421Impact of mechanical stress on 3-D NAND current conductionJournal articlehttps://ieeexplore.ieee.org/abstract/document/9210045