Conformal doping for FINFET's: a fabrication and metrology challenge

Vandervorst, WilfriedWilfriedVandervorstEveraert, Jean-LucJean-LucEveraertRosseel, ErikErikRosseelJurczak, GosiaGosiaJurczakHoffmann, Thomas Y.Thomas Y.HoffmannEyben, PierrePierreEybenMody, JayJayModyKoelling, SebastianSebastianKoellingGilbert, MatthieuMatthieuGilbertPawlak, BartekBartekPawlakDuffy, R.R.DuffyVan Dal, MarkMarkVan Dal2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14702Conformal doping for FINFET's: a fabrication and metrology challengeOral presentation