Frijter, CorneCorneFrijterVerbeek, RoyRoyVerbeekde Haas, GerardGerardde HaasKe, Tung HueiTung HueiKeVandenplas, ErwinErwinVandenplasAmeys, MarcMarcAmeysvan der Steen, Jan-LaurensJan-Laurensvan der SteenGelinck, GerwinGerwinGelinckMeulenkamp, EricEricMeulenkampPoodt, PaulPaulPoodtKronemeijer, AukeAukeKronemeijerKatsouras, IliasIliasKatsouras2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32991Low-temperature IGZO technology on transparent plastic foil by atmospheric spatial atomic layer depositionProceedings paperhttps://doi.org/10.36463/idw.2019.0489