Tsvetanova, DianaDianaTsvetanovaVos, RitaRitaVosVereecke, GuyGuyVereeckeParac-Vogt, TatjanaTatjanaParac-VogtClemente, FrancescaFrancescaClementeVanstreels, KrisKrisVanstreelsRadisic, DunjaDunjaRadisicConard, ThierryThierryConardFranquet, AlexisAlexisFranquetJivanescu, M.M.JivanescuNguyen, D. A. P.D. A. P.NguyenStesmans, AndreAndreStesmansBrijs, BertBertBrijsMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-192021-10-1920110013-4651https://imec-publications.be/handle/20.500.12860/19923Degradation of 248nm deep UV photoresist by ion implantationJournal article