Millimeter-wave switch based on air-gap-MEMS switched capacitors

Enayati, AminAminEnayatiRottenberg, XavierXavierRottenbergEkkels, PhillipPhillipEkkelsDe Raedt, WalterWalterDe RaedtVandenbosch, GuyGuyVandenbosch2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17073Millimeter-wave switch based on air-gap-MEMS switched capacitorsMeeting abstract