Pawlak, BartekBartekPawlakCowern, N.E.B.N.E.B.CowernVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-1820090003-6951https://imec-publications.be/handle/20.500.12860/16000B profile alteration by annealing in reactive ambientsJournal articlehttp://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=APPLAB000094000002022104000001&idtype=cvips&gifs=yes h