Marinins, AleksandrsAleksandrsMarininsDwivedi, Sarvagya PaavanSarvagya PaavanDwivediKjellman, JonJonKjellmanKerman, SarpSarpKermanDavid, TanglaTanglaDavidFigeys, BrunoBrunoFigeysJansen, RoelofRoelofJansenSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanRottenberg, XavierXavierRottenbergSoussan, PhilippePhilippeSoussan2021-10-292021-10-2920200021-4922https://imec-publications.be/handle/20.500.12860/35548Silicon photonics co-integrated with silicon nitride for optical phased arraysJournal article10.7567/1347-4065/ab5b6d