Heterodyne laser doppler vibrometers integrated on silicon-on-insulator based on serrodyne thermo-optic frequency shifters

Li, YanLuYanLuLiVerstuyft, StevenStevenVerstuyftYurtsever, GunayGunayYurtseverKeyvaninia, ShahramShahramKeyvaniniaRoelkens, GuntherGuntherRoelkensVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-212021-10-212013-040003-6935https://imec-publications.be/handle/20.500.12860/22690Heterodyne laser doppler vibrometers integrated on silicon-on-insulator based on serrodyne thermo-optic frequency shiftersJournal article