Quasi two-dimensional Si-O superlattices: Atomically controlled growth and electrical properties

Jayachandran, SuseendranSuseendranJayachandranSimoen, EddyEddySimoenMartens, KoenKoenMartensMeersschaut, JohanJohanMeersschautCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeynsDelabie, AnneliesAnneliesDelabie2021-10-232021-10-2320162162-8769https://imec-publications.be/handle/20.500.12860/26784Quasi two-dimensional Si-O superlattices: Atomically controlled growth and electrical propertiesJournal articlehttp://jss.ecsdl.org/content/5/7/P396.abstract