Line Edge Roughness on Directed Self Assembly: Impact of process conditions

MKuppuswamy, Vijaya KumarVijaya KumarMKuppuswamyWilliamson, LanceLanceWilliamsonPathangi Sriraman, HariHariPathangi SriramanSeidel, RobertRobertSeidelGronheid, RoelRoelGronheidNealey, PaulPaulNealeyLin, GuanyangGuanyangLinCao, YiYiCao2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25655Line Edge Roughness on Directed Self Assembly: Impact of process conditionsMeeting abstract