Milenin, AlexeyAlexeyMileninde Marneffe, Jean-FrancoisJean-Francoisde MarneffeStruyf, HerbertHerbertStruyfBoullart, WernerWernerBoullartArleo, PaulPaulArleo2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15860Sensor wafers in modern plasma etching technologyMeeting abstracthttp://www.pesm2009.be/