High-performance deep submicron Ge pMOSFETs with halo implants

Nicholas, GarethGarethNicholasDe Jaeger, BriceBriceDe JaegerBrunco, DavidDavidBruncoZimmerman, PaulPaulZimmermanEneman, GeertGeertEnemanMartens, KoenKoenMartensMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12621High-performance deep submicron Ge pMOSFETs with halo implantsJournal article