Characterization of intragrain defects in polycrystalline silicon layers obtained by aluminum-induced crystallization and epitaxy

Van Gestel, DriesDriesVan GestelGordon, IvanIvanGordonBender, HugoHugoBenderClemente, FrancescaFrancescaClementeBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmans2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14641Characterization of intragrain defects in polycrystalline silicon layers obtained by aluminum-induced crystallization and epitaxyOral presentation