Van Hoornick, NausikaaNausikaaVan HoornickDe Witte, HildeHildeDe WitteWitters, ThomasThomasWittersZhao, ChaoChaoZhaoConard, ThierryThierryConardHuatori, H.H.HuatoriSwerts, JohanJohanSwertsSchram, TomTomSchramMaes, JanJanMaesDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11401Evaluation of Nb(Si)N as metal gate materialMeeting abstract