Caymax, MattyMattyCaymaxJayachandran, SuseendranSuseendranJayachandranLu, AugustinAugustinLuDelabie, AnneliesAnneliesDelabieLoo, RogerRogerLooHikavyy, AndriyAndriyHikavyyPourtois, GeoffreyGeoffreyPourtoisVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeyns2021-10-212021-10-212013-06https://imec-publications.be/handle/20.500.12860/22108Oxygen in Si epitaxial growth: from interface contamination to Si/O superlattice engineeringMeeting abstract