Integration aspects of strained Ge pFETs

Witters, LiesbethLiesbethWittersEneman, GeertGeertEnemanMitard, JeromeJeromeMitardVincent, BenjaminBenjaminVincentLoo, RogerRogerLooHikavyy, AndriyAndriyHikavyyMilenin, AlexeyAlexeyMileninMertens, SofieSofieMertensThean, AaronAaronTheanCollaert, NadineNadineCollaert2021-10-222021-10-222014-080038-1101https://imec-publications.be/handle/20.500.12860/24825Integration aspects of strained Ge pFETsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0038110114000574