On-chip arrayed waveguide grating interrogated silicon-on-insulator microring resonator-based gas sensor

Ybanez, NatNatYbanezBogaerts, WimWimBogaertsHens, ZegerZegerHensBaets, RoelRoelBaets2021-10-192021-10-192011-101041-1135https://imec-publications.be/handle/20.500.12860/20177On-chip arrayed waveguide grating interrogated silicon-on-insulator microring resonator-based gas sensorJournal article