Job, R.R.JobUlyashin, A.G.A.G.UlyashinFahrner, W.R.W.R.FahrnerNiedernostheide, F.J.F.J.NiedernostheideSchulze, H. J.H. J.SchulzeSimoen, EddyEddySimoenClaeys, CorCorClaeysTonelli, G.G.Tonelli2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6442A low temperature technology on the base of hydrogen enhanced thermal donor formation for future high voltage applicationsProceedings paper