Baets, RoelRoelBaetsBogaerts, WimWimBogaertsDumon, PieterPieterDumonRoelkens, GuntherGuntherRoelkensChristiaens, IlseIlseChristiaensDe Mesel, KurtKurtDe MeselTaillaert, DirkDirkTaillaertLuyssaert, BertBertLuyssaertVan Campenhout, JorisJorisVan CampenhoutBienstman, PeterPeterBienstmanVan Thourhout, DriesDriesVan ThourhoutWiaux, VincentVincentWiauxWouters, Johan M. D.Johan M. D.WoutersBeckx, StephanStephanBeckx2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8517Integration of photonic functions in and with siliconProceedings paper