Contributions from electron tunneling and local bond breaking to the positive secondary ion yields

Alay, Josep LluisJosep LluisAlayVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/10Contributions from electron tunneling and local bond breaking to the positive secondary ion yieldsProceedings paper