Analysis of pocket profile deactivation and its impact on Vth variation for laser annealed device using an atomistic kinetic Monte Carlo approach

Noda, TaichiTaichiNodaVandervorst, WilfriedWilfriedVandervorstVrancken, ChristaChristaVranckenOrtolland, ClaudeClaudeOrtollandRosseel, ErikErikRosseelAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemansHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17703Analysis of pocket profile deactivation and its impact on Vth variation for laser annealed device using an atomistic kinetic Monte Carlo approachProceedings paper