Evaluation of via density and low-k Young's modulus influence on mechanical performance of advanced node multi-level Back-End-Of-Line

Kljucar, LukaLukaKljucarGonzalez, MarioMarioGonzalezDe Wolf, IngridIngridDe WolfCroes, KristofKristofCroesBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-232021-10-232016-010026-2714https://imec-publications.be/handle/20.500.12860/26837Evaluation of via density and low-k Young's modulus influence on mechanical performance of advanced node multi-level Back-End-Of-LineJournal article10.1016/j.microrel.2015.11.012http://www.sciencedirect.com/science/article/pii/S0026271415302274