Kunnen, EddyEddyKunnenVaglio Pret, AlessandroAlessandroVaglio PretVerdonck, PatrickPatrickVerdonckGronheid, RoelRoelGronheid2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20967Influence and evolution of 193i resist composition during VUV exposureMeeting abstract