O'Neill, AnthonyAnthonyO'NeillAgaiby, RimoonRimoonAgaibyOlsen, SarahSarahOlsenYang, Y.Y.YangHellstrom, P.-E.P.-E.HellstromOstling, M.M.OstlingOehme, M.M.OehmeLyutovich, K.K.LyutovichKasper, E.E.KasperEneman, GeertGeertEnemanVerheyen, PeterPeterVerheyenLoo, RogerRogerLooClaeys, CorCorClaeysFiegna, C.C.FiegnaSangiorgi, E.E.Sangiorgi2021-10-172021-10-1720080169-4332https://imec-publications.be/handle/20.500.12860/14252Reduced self-heating by strained silicon substrate engineeringJournal article