Petersen, Dirch H.Dirch H.PetersenHansen, OleOleHansenBĝggild, PeterPeterBĝggildLin, RongRongLinNielsen, Peter F.Peter F.NielsenLin, DennisDennisLinAdelmann, ChristophChristophAdelmannAlian, AliRezaAliRezaAlianMerckling, ClementClementMercklingPenaud, JulienJulienPenaudBrammertz, GuyGuyBrammertzGoossens, JozefienJozefienGoossensVandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysse2021-10-182021-10-1820101071-1023https://imec-publications.be/handle/20.500.12860/17796Electrical characterization of InGaAs ultra-shallow junctionsJournal articlehttp://dx.doi.org/10.1116/1.3231492