Improvement of AlN SAW performance by introduction of TiN nucleation layer on silicon substrate

Soltani, A.A.SoltaniTalbi, A.A.TalbiMortet, VincentVincentMortetBassam, A.A.BassamOussous, A.A.OussousMonroy, E.E.MonroyHaenen, KenKenHaenende Jaeger, J.C.J.C.de JaegerPernod, P.P.Pernod2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18008Improvement of AlN SAW performance by introduction of TiN nucleation layer on silicon substrateOral presentation