Development of a Cu and W compatible PERR clean in BEOL advanced interconnect patterning

Kesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeDecoster, StefanStefanDecosterVega Gonzalez, VictorVictorVega GonzalezHolsteyns, FrankFrankHolsteynsDe Gendt, StefanStefanDe Gendt2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25466Development of a Cu and W compatible PERR clean in BEOL advanced interconnect patterningProceedings paperhttp://ecst.ecsdl.org/content/69/8/207.abstract?related-urls=yes&legid=ecst;69/8/207