Direct current sputtered aluminum-doped zinc oxide films for thin silicon heterojunction solar cells

Qiu, YuYuQiuHermawan, HenricoHenricoHermawanGordon, IvanIvanGordonPoortmans, JefJefPoortmans2021-10-212021-10-2120131022-1352https://imec-publications.be/handle/20.500.12860/22965Direct current sputtered aluminum-doped zinc oxide films for thin silicon heterojunction solar cellsJournal articlehttp://www.sciencedirect.com/science/http://dx.doi.org/10.1016/j.matchemphys.2013.06.002