Roughness characterization in the frequency domain and LWR mitigation with post-litho processes

Vaglio Pret, AlessandroAlessandroVaglio PretGronheid, RoelRoelGronheidFoubert, PhilippePhilippeFoubert2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18127Roughness characterization in the frequency domain and LWR mitigation with post-litho processesProceedings paper