Wang, ZiyangZiyangWangLeonov, VladimirVladimirLeonovFiorini, PaoloPaoloFioriniVan Hoof, ChrisChrisVan Hoof2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14778Realization of a poly-SiGe based micromachined thermopileProceedings paper