Low loss CMOS-compatible PECVD silicon nitride waveguides and grating couplers blue light optogenetic applications

Hoffman, LuisLuisHoffmanSubramanian, AnanthAnanthSubramanianHelin, PhilippePhilippeHelinDu Bois, BertBertDu BoisBaets, RoelRoelBaetsVan Dorpe, PolPolVan DorpeGielen, GeorgesGeorgesGielenPuers, BobBobPuersBraeken, DriesDriesBraeken2021-10-232021-10-232016-081943-0655https://imec-publications.be/handle/20.500.12860/26731Low loss CMOS-compatible PECVD silicon nitride waveguides and grating couplers blue light optogenetic applicationsJournal articlehttp://ieeexplore.ieee.org/document/7547949/