Work function (WF) simulations of Ta/HfO2, Ta2C/HfO2 and Ta2C/La2O3/HfO2 capped high-k stacks

Van der Heyden, NikolaasNikolaasVan der HeydenPourtois, GeoffreyGeoffreyPourtoisDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsStesmans, AndreAndreStesmans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13041Work function (WF) simulations of Ta/HfO2, Ta2C/HfO2 and Ta2C/La2O3/HfO2 capped high-k stacksProceedings paper