Bender, HugoHugoBenderWu, Ming FangMing FangWuVantomme, AndreAndreVantommePattyn, HugoHugoPattynLangouche, G.G.Langouche2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1078Structural characterization of ion beam synthesized epitaxial ErSi2-x layersProceedings paper