Band alignments in metal-oxide-silicon structures with atomic-layer deposited Al2O3 and ZrO2

Afanas'ev, V. V.V. V.Afanas'evHoussa, MichelMichelHoussaStesmans, AndreAndreStesmansHeyns, MarcMarcHeyns2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/5936Band alignments in metal-oxide-silicon structures with atomic-layer deposited Al2O3 and ZrO2Journal article