Lattice defects in high quality as-grown CZ silicon, studied with light scattering and preferential etching techniques

Vanhellemont, JanJanVanhellemontKissinger, G.G.KissingerGräf, D.D.GräfKenis, KarineKarineKenisDepas, MichelMichelDepasMertens, PaulPaulMertensLambert, U.U.LambertHeyns, MarcMarcHeynsClaeys, C.C.ClaeysRichter, H.H.RichterWagner, PatrickPatrickWagner2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/973Lattice defects in high quality as-grown CZ silicon, studied with light scattering and preferential etching techniquesProceedings paper