Gonzalez, PilarPilarGonzalezGuo, BinBinGuoSeveri, SimoneSimoneSeveriDe Meyer, KristinKristinDe MeyerWitvrouw, AnnAnnWitvrouw2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18979A CMOS compatible polycrystalline silicon-germanium based piezoresistive pressure sensorProceedings paper