Petersen, Dirch H.Dirch H.PetersenHansen, OleOleHansenBoggild, PeterPeterBoggildLin, RongRongLinNielsen, Peter F.Peter F.NielsenLin, DennisDennisLinAdelmann, ChristophChristophAdelmannAlian, AliRezaAliRezaAlianMerckling, ClementClementMercklingPenaud, JulienJulienPenaudBrammertz, GuyGuyBrammertzGoossens, JozefienJozefienGoossensVandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysse2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16010Electrical characterization of InGaAs ultra-shallow junctionsProceedings paper